JPH0213483Y2 - - Google Patents

Info

Publication number
JPH0213483Y2
JPH0213483Y2 JP3032285U JP3032285U JPH0213483Y2 JP H0213483 Y2 JPH0213483 Y2 JP H0213483Y2 JP 3032285 U JP3032285 U JP 3032285U JP 3032285 U JP3032285 U JP 3032285U JP H0213483 Y2 JPH0213483 Y2 JP H0213483Y2
Authority
JP
Japan
Prior art keywords
ion beam
sputtering
target
gun
beam source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3032285U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61147262U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3032285U priority Critical patent/JPH0213483Y2/ja
Publication of JPS61147262U publication Critical patent/JPS61147262U/ja
Application granted granted Critical
Publication of JPH0213483Y2 publication Critical patent/JPH0213483Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3032285U 1985-03-05 1985-03-05 Expired JPH0213483Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3032285U JPH0213483Y2 (en]) 1985-03-05 1985-03-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3032285U JPH0213483Y2 (en]) 1985-03-05 1985-03-05

Publications (2)

Publication Number Publication Date
JPS61147262U JPS61147262U (en]) 1986-09-11
JPH0213483Y2 true JPH0213483Y2 (en]) 1990-04-13

Family

ID=30529916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3032285U Expired JPH0213483Y2 (en]) 1985-03-05 1985-03-05

Country Status (1)

Country Link
JP (1) JPH0213483Y2 (en])

Also Published As

Publication number Publication date
JPS61147262U (en]) 1986-09-11

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